2/14/2011	1:30:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	1:30:49 PM	Recipe started at 1:30 PM
2/14/2011	1:30:49 PM	H2 valve closed
2/14/2011	1:30:49 PM	BCl3 valve closed
2/14/2011	1:30:49 PM	PH3 valve closed
2/14/2011	1:30:49 PM	SiCl4 pre valve closed
2/14/2011	1:30:49 PM	SiCl4 post valve closed
2/14/2011	1:30:49 PM	Main Vac valve closed
2/14/2011	1:30:49 PM	Bypass valve closed
2/14/2011	1:30:49 PM	Bubbler valve closed
2/14/2011	1:30:49 PM	Helium valve opened
2/14/2011	1:30:49 PM	Helium MFC set to  500.000000
2/14/2011	1:30:49 PM	H2 MFC set to  0.000000
2/14/2011	1:30:49 PM	BCl3 MFC set to  0.000000
2/14/2011	1:30:49 PM	PHl3 MFC set to  0.000000
2/14/2011	1:30:49 PM	SiCl4 MFC set to  0.000000
2/14/2011	1:30:49 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	1:30:49 PM	Tube furnace set to 0
2/14/2011	1:32:08 PM	Helium valve closed
2/14/2011	1:32:08 PM	H2 valve closed
2/14/2011	1:32:08 PM	BCl3 valve closed
2/14/2011	1:32:08 PM	PH3 valve closed
2/14/2011	1:32:08 PM	SiCl4 pre valve closed
2/14/2011	1:32:08 PM	SiCl4 post valve closed
2/14/2011	1:32:08 PM	Main Vac valve closed
2/14/2011	1:32:08 PM	Bypass valve closed
2/14/2011	1:32:08 PM	Bubbler valve closed
2/14/2011	1:32:08 PM	Helium MFC set to  0.000000
2/14/2011	1:32:08 PM	H2 MFC set to  0.000000
2/14/2011	1:32:08 PM	BCl3 MFC set to  0.000000
2/14/2011	1:32:08 PM	PHl3 MFC set to  0.000000
2/14/2011	1:32:08 PM	SiCl4 MFC set to  0.000000
2/14/2011	1:32:08 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	1:32:08 PM	Tube furnace set to 0
2/14/2011	1:32:09 PM	Run finished at 1:32 PM
2/14/2011	1:32:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	1:38:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	1:38:25 PM	Recipe started at 1:38 PM
2/14/2011	1:38:25 PM	Helium valve closed
2/14/2011	1:38:25 PM	H2 valve closed
2/14/2011	1:38:25 PM	BCl3 valve closed
2/14/2011	1:38:25 PM	PH3 valve closed
2/14/2011	1:38:25 PM	SiCl4 pre valve closed
2/14/2011	1:38:25 PM	SiCl4 post valve closed
2/14/2011	1:38:25 PM	Main Vac valve closed
2/14/2011	1:38:25 PM	Bubbler valve closed
2/14/2011	1:38:25 PM	Bypass valve opened
2/14/2011	1:38:25 PM	Helium MFC set to  0.000000
2/14/2011	1:38:25 PM	H2 MFC set to  0.000000
2/14/2011	1:38:25 PM	BCl3 MFC set to  0.000000
2/14/2011	1:38:25 PM	PHl3 MFC set to  0.000000
2/14/2011	1:38:25 PM	SiCl4 MFC set to  0.000000
2/14/2011	1:38:25 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	1:38:25 PM	Tube furnace set to 0
2/14/2011	1:38:57 PM	Helium valve closed
2/14/2011	1:38:57 PM	H2 valve closed
2/14/2011	1:38:57 PM	BCl3 valve closed
2/14/2011	1:38:57 PM	PH3 valve closed
2/14/2011	1:38:57 PM	SiCl4 pre valve closed
2/14/2011	1:38:57 PM	SiCl4 post valve closed
2/14/2011	1:38:57 PM	Bubbler valve closed
2/14/2011	1:38:57 PM	Main Vac valve opened
2/14/2011	1:38:57 PM	Bypass valve opened
2/14/2011	1:38:57 PM	Helium MFC set to  0.000000
2/14/2011	1:38:57 PM	H2 MFC set to  0.000000
2/14/2011	1:38:57 PM	BCl3 MFC set to  0.000000
2/14/2011	1:38:57 PM	PHl3 MFC set to  0.000000
2/14/2011	1:38:57 PM	SiCl4 MFC set to  0.000000
2/14/2011	1:38:57 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	1:38:57 PM	Tube furnace set to 0
2/14/2011	1:38:57 PM	Run finished at 1:38 PM
2/14/2011	1:38:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	1:39:25 PM	Helium MFC set to  40.000000
2/14/2011	1:39:25 PM	Helium valve opened
2/14/2011	1:42:47 PM	Helium valve closed
2/14/2011	1:45:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	1:45:04 PM	Recipe started at 1:45 PM
2/14/2011	1:45:04 PM	H2 valve closed
2/14/2011	1:45:04 PM	BCl3 valve closed
2/14/2011	1:45:04 PM	PH3 valve closed
2/14/2011	1:45:04 PM	SiCl4 pre valve closed
2/14/2011	1:45:04 PM	SiCl4 post valve closed
2/14/2011	1:45:04 PM	Main Vac valve closed
2/14/2011	1:45:04 PM	Bypass valve closed
2/14/2011	1:45:04 PM	Bubbler valve closed
2/14/2011	1:45:04 PM	Helium valve opened
2/14/2011	1:45:04 PM	Helium MFC set to  500.000000
2/14/2011	1:45:04 PM	H2 MFC set to  0.000000
2/14/2011	1:45:04 PM	BCl3 MFC set to  0.000000
2/14/2011	1:45:04 PM	PHl3 MFC set to  0.000000
2/14/2011	1:45:04 PM	SiCl4 MFC set to  0.000000
2/14/2011	1:45:04 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	1:45:05 PM	Tube furnace set to 0
2/14/2011	1:46:25 PM	Helium valve closed
2/14/2011	1:46:25 PM	H2 valve closed
2/14/2011	1:46:25 PM	BCl3 valve closed
2/14/2011	1:46:25 PM	PH3 valve closed
2/14/2011	1:46:25 PM	SiCl4 pre valve closed
2/14/2011	1:46:25 PM	SiCl4 post valve closed
2/14/2011	1:46:25 PM	Main Vac valve closed
2/14/2011	1:46:25 PM	Bypass valve closed
2/14/2011	1:46:25 PM	Bubbler valve closed
2/14/2011	1:46:25 PM	Helium MFC set to  0.000000
2/14/2011	1:46:25 PM	H2 MFC set to  0.000000
2/14/2011	1:46:25 PM	BCl3 MFC set to  0.000000
2/14/2011	1:46:25 PM	PHl3 MFC set to  0.000000
2/14/2011	1:46:25 PM	SiCl4 MFC set to  0.000000
2/14/2011	1:46:25 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	1:46:25 PM	Tube furnace set to 0
2/14/2011	1:46:25 PM	Run finished at 1:46 PM
2/14/2011	1:46:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	1:49:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	1:49:16 PM	Recipe started at 1:49 PM
2/14/2011	1:49:16 PM	Helium valve closed
2/14/2011	1:49:16 PM	H2 valve closed
2/14/2011	1:49:16 PM	BCl3 valve closed
2/14/2011	1:49:16 PM	PH3 valve closed
2/14/2011	1:49:16 PM	SiCl4 pre valve closed
2/14/2011	1:49:16 PM	SiCl4 post valve closed
2/14/2011	1:49:16 PM	Main Vac valve closed
2/14/2011	1:49:16 PM	Bubbler valve closed
2/14/2011	1:49:16 PM	Bypass valve opened
2/14/2011	1:49:16 PM	Helium MFC set to  0.000000
2/14/2011	1:49:16 PM	H2 MFC set to  0.000000
2/14/2011	1:49:16 PM	BCl3 MFC set to  0.000000
2/14/2011	1:49:16 PM	PHl3 MFC set to  0.000000
2/14/2011	1:49:16 PM	SiCl4 MFC set to  0.000000
2/14/2011	1:49:16 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	1:49:16 PM	Tube furnace set to 0
2/14/2011	1:49:48 PM	Helium valve closed
2/14/2011	1:49:48 PM	H2 valve closed
2/14/2011	1:49:48 PM	BCl3 valve closed
2/14/2011	1:49:48 PM	PH3 valve closed
2/14/2011	1:49:48 PM	SiCl4 pre valve closed
2/14/2011	1:49:48 PM	SiCl4 post valve closed
2/14/2011	1:49:48 PM	Bubbler valve closed
2/14/2011	1:49:48 PM	Main Vac valve opened
2/14/2011	1:49:48 PM	Bypass valve opened
2/14/2011	1:49:48 PM	Helium MFC set to  0.000000
2/14/2011	1:49:48 PM	H2 MFC set to  0.000000
2/14/2011	1:49:48 PM	BCl3 MFC set to  0.000000
2/14/2011	1:49:48 PM	PHl3 MFC set to  0.000000
2/14/2011	1:49:48 PM	SiCl4 MFC set to  0.000000
2/14/2011	1:49:48 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	1:49:48 PM	Tube furnace set to 0
2/14/2011	1:49:49 PM	Run finished at 1:49 PM
2/14/2011	1:49:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	1:51:21 PM	Helium MFC set to  20.000000
2/14/2011	1:51:21 PM	Helium valve opened
2/14/2011	2:13:12 PM	Helium valve closed
2/14/2011	2:13:59 PM	Helium MFC set to  40.000000
2/14/2011	2:13:59 PM	Helium valve opened
2/14/2011	2:25:54 PM	Helium valve closed
2/14/2011	2:27:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/14/2011	2:27:46 PM	Recipe started at 2:27 PM
2/14/2011	2:27:46 PM	Helium valve closed
2/14/2011	2:27:46 PM	H2 valve closed
2/14/2011	2:27:46 PM	BCl3 valve closed
2/14/2011	2:27:46 PM	PH3 valve closed
2/14/2011	2:27:46 PM	SiCl4 pre valve closed
2/14/2011	2:27:46 PM	SiCl4 post valve closed
2/14/2011	2:27:46 PM	Main Vac valve closed
2/14/2011	2:27:46 PM	Bypass valve closed
2/14/2011	2:27:46 PM	Bubbler valve closed
2/14/2011	2:27:46 PM	Helium MFC set to  0.000000
2/14/2011	2:27:46 PM	H2 MFC set to  0.000000
2/14/2011	2:27:46 PM	BCl3 MFC set to  0.000000
2/14/2011	2:27:46 PM	PHl3 MFC set to  0.000000
2/14/2011	2:27:46 PM	SiCl4 MFC set to  0.000000
2/14/2011	2:27:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	2:27:46 PM	Tube furnace set to 0
2/14/2011	2:27:46 PM	Run finished at 2:27 PM
2/14/2011	2:27:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/14/2011	2:28:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	2:28:01 PM	Recipe started at 2:28 PM
2/14/2011	2:28:01 PM	Helium valve closed
2/14/2011	2:28:01 PM	H2 valve closed
2/14/2011	2:28:01 PM	BCl3 valve closed
2/14/2011	2:28:01 PM	PH3 valve closed
2/14/2011	2:28:01 PM	SiCl4 pre valve closed
2/14/2011	2:28:01 PM	SiCl4 post valve closed
2/14/2011	2:28:01 PM	Main Vac valve closed
2/14/2011	2:28:01 PM	Bubbler valve closed
2/14/2011	2:28:01 PM	Bypass valve opened
2/14/2011	2:28:01 PM	Helium MFC set to  0.000000
2/14/2011	2:28:01 PM	H2 MFC set to  0.000000
2/14/2011	2:28:01 PM	BCl3 MFC set to  0.000000
2/14/2011	2:28:01 PM	PHl3 MFC set to  0.000000
2/14/2011	2:28:01 PM	SiCl4 MFC set to  0.000000
2/14/2011	2:28:01 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	2:28:01 PM	Tube furnace set to 0
2/14/2011	2:28:02 PM	Helium valve closed
2/14/2011	2:28:02 PM	H2 valve closed
2/14/2011	2:28:02 PM	BCl3 valve closed
2/14/2011	2:28:02 PM	PH3 valve closed
2/14/2011	2:28:02 PM	SiCl4 pre valve closed
2/14/2011	2:28:02 PM	SiCl4 post valve closed
2/14/2011	2:28:02 PM	Bubbler valve closed
2/14/2011	2:28:02 PM	Main Vac valve opened
2/14/2011	2:28:02 PM	Bypass valve opened
2/14/2011	2:28:02 PM	Helium MFC set to  0.000000
2/14/2011	2:28:02 PM	H2 MFC set to  0.000000
2/14/2011	2:28:02 PM	BCl3 MFC set to  0.000000
2/14/2011	2:28:02 PM	PHl3 MFC set to  0.000000
2/14/2011	2:28:02 PM	SiCl4 MFC set to  0.000000
2/14/2011	2:28:02 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	2:28:02 PM	Tube furnace set to 0
2/14/2011	2:28:02 PM	Run finished at 2:28 PM
2/14/2011	2:28:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	2:29:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	2:29:20 PM	Recipe started at 2:29 PM
2/14/2011	2:29:20 PM	H2 valve closed
2/14/2011	2:29:20 PM	BCl3 valve closed
2/14/2011	2:29:20 PM	PH3 valve closed
2/14/2011	2:29:20 PM	SiCl4 pre valve closed
2/14/2011	2:29:20 PM	SiCl4 post valve closed
2/14/2011	2:29:20 PM	Main Vac valve closed
2/14/2011	2:29:20 PM	Bypass valve closed
2/14/2011	2:29:20 PM	Bubbler valve closed
2/14/2011	2:29:20 PM	Helium valve opened
2/14/2011	2:29:20 PM	Helium MFC set to  500.000000
2/14/2011	2:29:20 PM	H2 MFC set to  0.000000
2/14/2011	2:29:20 PM	BCl3 MFC set to  0.000000
2/14/2011	2:29:20 PM	PHl3 MFC set to  0.000000
2/14/2011	2:29:20 PM	SiCl4 MFC set to  0.000000
2/14/2011	2:29:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	2:29:20 PM	Tube furnace set to 0
2/14/2011	2:30:41 PM	Helium valve closed
2/14/2011	2:30:41 PM	H2 valve closed
2/14/2011	2:30:41 PM	BCl3 valve closed
2/14/2011	2:30:41 PM	PH3 valve closed
2/14/2011	2:30:41 PM	SiCl4 pre valve closed
2/14/2011	2:30:41 PM	SiCl4 post valve closed
2/14/2011	2:30:41 PM	Main Vac valve closed
2/14/2011	2:30:41 PM	Bypass valve closed
2/14/2011	2:30:41 PM	Bubbler valve closed
2/14/2011	2:30:41 PM	Helium MFC set to  0.000000
2/14/2011	2:30:41 PM	H2 MFC set to  0.000000
2/14/2011	2:30:41 PM	BCl3 MFC set to  0.000000
2/14/2011	2:30:41 PM	PHl3 MFC set to  0.000000
2/14/2011	2:30:41 PM	SiCl4 MFC set to  0.000000
2/14/2011	2:30:41 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	2:30:41 PM	Tube furnace set to 0
2/14/2011	2:30:41 PM	Run finished at 2:30 PM
2/14/2011	2:30:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	2:33:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	2:33:07 PM	Recipe started at 2:33 PM
2/14/2011	2:33:07 PM	Helium valve closed
2/14/2011	2:33:07 PM	H2 valve closed
2/14/2011	2:33:07 PM	BCl3 valve closed
2/14/2011	2:33:07 PM	PH3 valve closed
2/14/2011	2:33:07 PM	SiCl4 pre valve closed
2/14/2011	2:33:07 PM	SiCl4 post valve closed
2/14/2011	2:33:07 PM	Main Vac valve closed
2/14/2011	2:33:07 PM	Bubbler valve closed
2/14/2011	2:33:07 PM	Bypass valve opened
2/14/2011	2:33:07 PM	Helium MFC set to  0.000000
2/14/2011	2:33:07 PM	H2 MFC set to  0.000000
2/14/2011	2:33:07 PM	BCl3 MFC set to  0.000000
2/14/2011	2:33:07 PM	PHl3 MFC set to  0.000000
2/14/2011	2:33:07 PM	SiCl4 MFC set to  0.000000
2/14/2011	2:33:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	2:33:07 PM	Tube furnace set to 0
2/14/2011	2:33:38 PM	Helium valve closed
2/14/2011	2:33:38 PM	H2 valve closed
2/14/2011	2:33:38 PM	BCl3 valve closed
2/14/2011	2:33:38 PM	PH3 valve closed
2/14/2011	2:33:38 PM	SiCl4 pre valve closed
2/14/2011	2:33:38 PM	SiCl4 post valve closed
2/14/2011	2:33:38 PM	Bubbler valve closed
2/14/2011	2:33:38 PM	Main Vac valve opened
2/14/2011	2:33:38 PM	Bypass valve opened
2/14/2011	2:33:38 PM	Helium MFC set to  0.000000
2/14/2011	2:33:38 PM	H2 MFC set to  0.000000
2/14/2011	2:33:38 PM	BCl3 MFC set to  0.000000
2/14/2011	2:33:38 PM	PHl3 MFC set to  0.000000
2/14/2011	2:33:39 PM	SiCl4 MFC set to  0.000000
2/14/2011	2:33:39 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	2:33:39 PM	Tube furnace set to 0
2/14/2011	2:33:39 PM	Run finished at 2:33 PM
2/14/2011	2:33:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	2:34:35 PM	Helium MFC set to  40.000000
2/14/2011	2:34:36 PM	Helium valve opened
2/14/2011	2:36:36 PM	Helium valve closed
2/14/2011	2:37:17 PM	Helium valve opened
2/14/2011	2:41:43 PM	Helium valve closed
2/14/2011	2:42:23 PM	Helium valve opened
2/14/2011	2:45:48 PM	Helium valve closed
2/14/2011	2:47:02 PM	Helium MFC set to  15.000000
2/14/2011	2:47:02 PM	Helium valve opened
2/14/2011	4:11:35 PM	Helium valve closed
2/14/2011	4:12:43 PM	Helium MFC set to  50.000000
2/14/2011	4:12:44 PM	Helium valve opened
2/14/2011	4:13:10 PM	Helium valve closed
2/14/2011	4:13:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/14/2011	4:13:55 PM	Recipe started at 4:13 PM
2/14/2011	4:13:55 PM	Helium valve closed
2/14/2011	4:13:55 PM	H2 valve closed
2/14/2011	4:13:55 PM	BCl3 valve closed
2/14/2011	4:13:55 PM	PH3 valve closed
2/14/2011	4:13:55 PM	SiCl4 pre valve closed
2/14/2011	4:13:55 PM	SiCl4 post valve closed
2/14/2011	4:13:55 PM	Main Vac valve closed
2/14/2011	4:13:55 PM	Bypass valve closed
2/14/2011	4:13:55 PM	Bubbler valve closed
2/14/2011	4:13:55 PM	Helium MFC set to  0.000000
2/14/2011	4:13:55 PM	H2 MFC set to  0.000000
2/14/2011	4:13:55 PM	BCl3 MFC set to  0.000000
2/14/2011	4:13:55 PM	PHl3 MFC set to  0.000000
2/14/2011	4:13:55 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:13:55 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:13:55 PM	Tube furnace set to 0
2/14/2011	4:13:55 PM	Run finished at 4:13 PM
2/14/2011	4:13:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/14/2011	4:14:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	4:14:08 PM	Recipe started at 4:14 PM
2/14/2011	4:14:08 PM	Helium valve closed
2/14/2011	4:14:08 PM	H2 valve closed
2/14/2011	4:14:08 PM	BCl3 valve closed
2/14/2011	4:14:08 PM	PH3 valve closed
2/14/2011	4:14:08 PM	SiCl4 pre valve closed
2/14/2011	4:14:08 PM	SiCl4 post valve closed
2/14/2011	4:14:08 PM	Main Vac valve closed
2/14/2011	4:14:08 PM	Bubbler valve closed
2/14/2011	4:14:08 PM	Bypass valve opened
2/14/2011	4:14:08 PM	Helium MFC set to  0.000000
2/14/2011	4:14:08 PM	H2 MFC set to  0.000000
2/14/2011	4:14:08 PM	BCl3 MFC set to  0.000000
2/14/2011	4:14:08 PM	PHl3 MFC set to  0.000000
2/14/2011	4:14:08 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:14:08 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:14:08 PM	Tube furnace set to 0
2/14/2011	4:14:09 PM	Helium valve closed
2/14/2011	4:14:09 PM	H2 valve closed
2/14/2011	4:14:09 PM	BCl3 valve closed
2/14/2011	4:14:09 PM	PH3 valve closed
2/14/2011	4:14:09 PM	SiCl4 pre valve closed
2/14/2011	4:14:09 PM	SiCl4 post valve closed
2/14/2011	4:14:09 PM	Bubbler valve closed
2/14/2011	4:14:09 PM	Main Vac valve opened
2/14/2011	4:14:09 PM	Bypass valve opened
2/14/2011	4:14:09 PM	Helium MFC set to  0.000000
2/14/2011	4:14:09 PM	H2 MFC set to  0.000000
2/14/2011	4:14:09 PM	BCl3 MFC set to  0.000000
2/14/2011	4:14:09 PM	PHl3 MFC set to  0.000000
2/14/2011	4:14:09 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:14:09 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:14:09 PM	Tube furnace set to 0
2/14/2011	4:14:09 PM	Run finished at 4:14 PM
2/14/2011	4:14:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	4:14:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	4:14:18 PM	Recipe started at 4:14 PM
2/14/2011	4:14:18 PM	H2 valve closed
2/14/2011	4:14:18 PM	BCl3 valve closed
2/14/2011	4:14:18 PM	PH3 valve closed
2/14/2011	4:14:18 PM	SiCl4 pre valve closed
2/14/2011	4:14:18 PM	SiCl4 post valve closed
2/14/2011	4:14:18 PM	Main Vac valve closed
2/14/2011	4:14:18 PM	Bypass valve closed
2/14/2011	4:14:18 PM	Bubbler valve closed
2/14/2011	4:14:18 PM	Helium valve opened
2/14/2011	4:14:18 PM	Helium MFC set to  500.000000
2/14/2011	4:14:18 PM	H2 MFC set to  0.000000
2/14/2011	4:14:18 PM	BCl3 MFC set to  0.000000
2/14/2011	4:14:18 PM	PHl3 MFC set to  0.000000
2/14/2011	4:14:18 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:14:18 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:14:18 PM	Tube furnace set to 0
2/14/2011	4:15:40 PM	Helium valve closed
2/14/2011	4:15:40 PM	H2 valve closed
2/14/2011	4:15:40 PM	BCl3 valve closed
2/14/2011	4:15:40 PM	PH3 valve closed
2/14/2011	4:15:40 PM	SiCl4 pre valve closed
2/14/2011	4:15:40 PM	SiCl4 post valve closed
2/14/2011	4:15:40 PM	Main Vac valve closed
2/14/2011	4:15:40 PM	Bypass valve closed
2/14/2011	4:15:40 PM	Bubbler valve closed
2/14/2011	4:15:40 PM	Helium MFC set to  0.000000
2/14/2011	4:15:40 PM	H2 MFC set to  0.000000
2/14/2011	4:15:40 PM	BCl3 MFC set to  0.000000
2/14/2011	4:15:40 PM	PHl3 MFC set to  0.000000
2/14/2011	4:15:40 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:15:40 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:15:40 PM	Tube furnace set to 0
2/14/2011	4:15:41 PM	Run finished at 4:15 PM
2/14/2011	4:15:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	4:22:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	4:22:18 PM	Recipe started at 4:22 PM
2/14/2011	4:22:18 PM	Helium valve closed
2/14/2011	4:22:18 PM	H2 valve closed
2/14/2011	4:22:18 PM	BCl3 valve closed
2/14/2011	4:22:18 PM	PH3 valve closed
2/14/2011	4:22:18 PM	SiCl4 pre valve closed
2/14/2011	4:22:18 PM	SiCl4 post valve closed
2/14/2011	4:22:18 PM	Main Vac valve closed
2/14/2011	4:22:18 PM	Bubbler valve closed
2/14/2011	4:22:18 PM	Bypass valve opened
2/14/2011	4:22:18 PM	Helium MFC set to  0.000000
2/14/2011	4:22:18 PM	H2 MFC set to  0.000000
2/14/2011	4:22:18 PM	BCl3 MFC set to  0.000000
2/14/2011	4:22:18 PM	PHl3 MFC set to  0.000000
2/14/2011	4:22:18 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:22:18 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:22:19 PM	Tube furnace set to 0
2/14/2011	4:22:51 PM	Helium valve closed
2/14/2011	4:22:51 PM	H2 valve closed
2/14/2011	4:22:51 PM	BCl3 valve closed
2/14/2011	4:22:51 PM	PH3 valve closed
2/14/2011	4:22:51 PM	SiCl4 pre valve closed
2/14/2011	4:22:51 PM	SiCl4 post valve closed
2/14/2011	4:22:51 PM	Bubbler valve closed
2/14/2011	4:22:51 PM	Main Vac valve opened
2/14/2011	4:22:51 PM	Bypass valve opened
2/14/2011	4:22:51 PM	Helium MFC set to  0.000000
2/14/2011	4:22:51 PM	H2 MFC set to  0.000000
2/14/2011	4:22:51 PM	BCl3 MFC set to  0.000000
2/14/2011	4:22:51 PM	PHl3 MFC set to  0.000000
2/14/2011	4:22:51 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:22:51 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:22:51 PM	Tube furnace set to 0
2/14/2011	4:22:51 PM	Run finished at 4:22 PM
2/14/2011	4:22:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	4:23:57 PM	Helium MFC set to  50.000000
2/14/2011	4:23:58 PM	Helium valve opened
2/14/2011	4:24:19 PM	Helium valve closed
2/14/2011	4:24:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	4:24:47 PM	Recipe started at 4:24 PM
2/14/2011	4:24:47 PM	H2 valve closed
2/14/2011	4:24:47 PM	BCl3 valve closed
2/14/2011	4:24:47 PM	PH3 valve closed
2/14/2011	4:24:47 PM	SiCl4 pre valve closed
2/14/2011	4:24:47 PM	SiCl4 post valve closed
2/14/2011	4:24:47 PM	Main Vac valve closed
2/14/2011	4:24:47 PM	Bypass valve closed
2/14/2011	4:24:47 PM	Bubbler valve closed
2/14/2011	4:24:47 PM	Helium valve opened
2/14/2011	4:24:47 PM	Helium MFC set to  500.000000
2/14/2011	4:24:47 PM	H2 MFC set to  0.000000
2/14/2011	4:24:47 PM	BCl3 MFC set to  0.000000
2/14/2011	4:24:47 PM	PHl3 MFC set to  0.000000
2/14/2011	4:24:47 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:24:47 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:24:47 PM	Tube furnace set to 0
2/14/2011	4:26:09 PM	Helium valve closed
2/14/2011	4:26:09 PM	H2 valve closed
2/14/2011	4:26:09 PM	BCl3 valve closed
2/14/2011	4:26:09 PM	PH3 valve closed
2/14/2011	4:26:09 PM	SiCl4 pre valve closed
2/14/2011	4:26:09 PM	SiCl4 post valve closed
2/14/2011	4:26:09 PM	Main Vac valve closed
2/14/2011	4:26:09 PM	Bypass valve closed
2/14/2011	4:26:09 PM	Bubbler valve closed
2/14/2011	4:26:09 PM	Helium MFC set to  0.000000
2/14/2011	4:26:09 PM	H2 MFC set to  0.000000
2/14/2011	4:26:09 PM	BCl3 MFC set to  0.000000
2/14/2011	4:26:09 PM	PHl3 MFC set to  0.000000
2/14/2011	4:26:09 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:26:09 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:26:09 PM	Tube furnace set to 0
2/14/2011	4:26:09 PM	Run finished at 4:26 PM
2/14/2011	4:26:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	4:34:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	4:34:57 PM	Recipe started at 4:34 PM
2/14/2011	4:34:57 PM	Helium valve closed
2/14/2011	4:34:57 PM	H2 valve closed
2/14/2011	4:34:57 PM	BCl3 valve closed
2/14/2011	4:34:57 PM	PH3 valve closed
2/14/2011	4:34:57 PM	SiCl4 pre valve closed
2/14/2011	4:34:57 PM	SiCl4 post valve closed
2/14/2011	4:34:57 PM	Main Vac valve closed
2/14/2011	4:34:57 PM	Bubbler valve closed
2/14/2011	4:34:57 PM	Bypass valve opened
2/14/2011	4:34:57 PM	Helium MFC set to  0.000000
2/14/2011	4:34:57 PM	H2 MFC set to  0.000000
2/14/2011	4:34:57 PM	BCl3 MFC set to  0.000000
2/14/2011	4:34:57 PM	PHl3 MFC set to  0.000000
2/14/2011	4:34:57 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:34:57 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:34:58 PM	Tube furnace set to 0
2/14/2011	4:35:30 PM	Helium valve closed
2/14/2011	4:35:30 PM	H2 valve closed
2/14/2011	4:35:30 PM	BCl3 valve closed
2/14/2011	4:35:30 PM	PH3 valve closed
2/14/2011	4:35:30 PM	SiCl4 pre valve closed
2/14/2011	4:35:30 PM	SiCl4 post valve closed
2/14/2011	4:35:30 PM	Bubbler valve closed
2/14/2011	4:35:30 PM	Main Vac valve opened
2/14/2011	4:35:30 PM	Bypass valve opened
2/14/2011	4:35:30 PM	Helium MFC set to  0.000000
2/14/2011	4:35:30 PM	H2 MFC set to  0.000000
2/14/2011	4:35:30 PM	BCl3 MFC set to  0.000000
2/14/2011	4:35:30 PM	PHl3 MFC set to  0.000000
2/14/2011	4:35:30 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:35:30 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:35:30 PM	Tube furnace set to 0
2/14/2011	4:35:30 PM	Run finished at 4:35 PM
2/14/2011	4:35:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	4:37:11 PM	Helium MFC set to  100.000000
2/14/2011	4:37:12 PM	Helium valve opened
2/14/2011	4:37:39 PM	Helium valve closed
2/14/2011	4:40:21 PM	Helium MFC set to  40.000000
2/14/2011	4:40:21 PM	Helium valve opened
2/14/2011	4:45:22 PM	Helium valve closed
2/14/2011	4:51:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	4:51:16 PM	Recipe started at 4:51 PM
2/14/2011	4:51:16 PM	H2 valve closed
2/14/2011	4:51:16 PM	BCl3 valve closed
2/14/2011	4:51:16 PM	PH3 valve closed
2/14/2011	4:51:16 PM	SiCl4 pre valve closed
2/14/2011	4:51:16 PM	SiCl4 post valve closed
2/14/2011	4:51:16 PM	Main Vac valve closed
2/14/2011	4:51:16 PM	Bypass valve closed
2/14/2011	4:51:16 PM	Bubbler valve closed
2/14/2011	4:51:16 PM	Helium valve opened
2/14/2011	4:51:16 PM	Helium MFC set to  500.000000
2/14/2011	4:51:16 PM	H2 MFC set to  0.000000
2/14/2011	4:51:16 PM	BCl3 MFC set to  0.000000
2/14/2011	4:51:16 PM	PHl3 MFC set to  0.000000
2/14/2011	4:51:16 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:51:16 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:51:16 PM	Tube furnace set to 0
2/14/2011	4:52:38 PM	Helium valve closed
2/14/2011	4:52:38 PM	H2 valve closed
2/14/2011	4:52:38 PM	BCl3 valve closed
2/14/2011	4:52:38 PM	PH3 valve closed
2/14/2011	4:52:38 PM	SiCl4 pre valve closed
2/14/2011	4:52:38 PM	SiCl4 post valve closed
2/14/2011	4:52:38 PM	Main Vac valve closed
2/14/2011	4:52:38 PM	Bypass valve closed
2/14/2011	4:52:38 PM	Bubbler valve closed
2/14/2011	4:52:38 PM	Helium MFC set to  0.000000
2/14/2011	4:52:38 PM	H2 MFC set to  0.000000
2/14/2011	4:52:38 PM	BCl3 MFC set to  0.000000
2/14/2011	4:52:38 PM	PHl3 MFC set to  0.000000
2/14/2011	4:52:38 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:52:38 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:52:38 PM	Tube furnace set to 0
2/14/2011	4:52:38 PM	Run finished at 4:52 PM
2/14/2011	4:52:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	4:53:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	4:53:36 PM	Recipe started at 4:53 PM
2/14/2011	4:53:37 PM	Helium valve closed
2/14/2011	4:53:37 PM	H2 valve closed
2/14/2011	4:53:37 PM	BCl3 valve closed
2/14/2011	4:53:37 PM	PH3 valve closed
2/14/2011	4:53:37 PM	SiCl4 pre valve closed
2/14/2011	4:53:37 PM	SiCl4 post valve closed
2/14/2011	4:53:37 PM	Main Vac valve closed
2/14/2011	4:53:37 PM	Bubbler valve closed
2/14/2011	4:53:37 PM	Bypass valve opened
2/14/2011	4:53:37 PM	Helium MFC set to  0.000000
2/14/2011	4:53:37 PM	H2 MFC set to  0.000000
2/14/2011	4:53:37 PM	BCl3 MFC set to  0.000000
2/14/2011	4:53:37 PM	PHl3 MFC set to  0.000000
2/14/2011	4:53:37 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:53:37 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:53:37 PM	Tube furnace set to 0
2/14/2011	4:53:52 PM	Helium valve closed
2/14/2011	4:53:52 PM	H2 valve closed
2/14/2011	4:53:52 PM	BCl3 valve closed
2/14/2011	4:53:52 PM	PH3 valve closed
2/14/2011	4:53:52 PM	SiCl4 pre valve closed
2/14/2011	4:53:52 PM	SiCl4 post valve closed
2/14/2011	4:53:52 PM	Bubbler valve closed
2/14/2011	4:53:52 PM	Main Vac valve opened
2/14/2011	4:53:52 PM	Bypass valve opened
2/14/2011	4:53:52 PM	Helium MFC set to  0.000000
2/14/2011	4:53:52 PM	H2 MFC set to  0.000000
2/14/2011	4:53:52 PM	BCl3 MFC set to  0.000000
2/14/2011	4:53:52 PM	PHl3 MFC set to  0.000000
2/14/2011	4:53:52 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:53:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:53:52 PM	Tube furnace set to 0
2/14/2011	4:53:52 PM	Run finished at 4:53 PM
2/14/2011	4:53:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	4:55:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/14/2011	4:55:09 PM	Recipe started at 4:55 PM
2/14/2011	4:55:10 PM	Helium valve closed
2/14/2011	4:55:10 PM	H2 valve closed
2/14/2011	4:55:10 PM	BCl3 valve closed
2/14/2011	4:55:10 PM	PH3 valve closed
2/14/2011	4:55:10 PM	SiCl4 pre valve closed
2/14/2011	4:55:10 PM	SiCl4 post valve closed
2/14/2011	4:55:10 PM	Main Vac valve closed
2/14/2011	4:55:10 PM	Bypass valve closed
2/14/2011	4:55:10 PM	Bubbler valve closed
2/14/2011	4:55:10 PM	Helium MFC set to  0.000000
2/14/2011	4:55:10 PM	H2 MFC set to  0.000000
2/14/2011	4:55:10 PM	BCl3 MFC set to  0.000000
2/14/2011	4:55:10 PM	PHl3 MFC set to  0.000000
2/14/2011	4:55:10 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:55:10 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:55:10 PM	Tube furnace set to 0
2/14/2011	4:55:10 PM	Run finished at 4:55 PM
2/14/2011	4:55:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/14/2011	4:56:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	4:56:44 PM	Recipe started at 4:56 PM
2/14/2011	4:56:44 PM	Helium valve closed
2/14/2011	4:56:44 PM	H2 valve closed
2/14/2011	4:56:44 PM	BCl3 valve closed
2/14/2011	4:56:44 PM	PH3 valve closed
2/14/2011	4:56:44 PM	SiCl4 pre valve closed
2/14/2011	4:56:44 PM	SiCl4 post valve closed
2/14/2011	4:56:44 PM	Main Vac valve closed
2/14/2011	4:56:44 PM	Bubbler valve closed
2/14/2011	4:56:44 PM	Bypass valve opened
2/14/2011	4:56:44 PM	Helium MFC set to  0.000000
2/14/2011	4:56:44 PM	H2 MFC set to  0.000000
2/14/2011	4:56:44 PM	BCl3 MFC set to  0.000000
2/14/2011	4:56:44 PM	PHl3 MFC set to  0.000000
2/14/2011	4:56:44 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:56:44 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:56:45 PM	Tube furnace set to 0
2/14/2011	4:57:20 PM	Helium valve closed
2/14/2011	4:57:20 PM	H2 valve closed
2/14/2011	4:57:20 PM	BCl3 valve closed
2/14/2011	4:57:20 PM	PH3 valve closed
2/14/2011	4:57:20 PM	SiCl4 pre valve closed
2/14/2011	4:57:20 PM	SiCl4 post valve closed
2/14/2011	4:57:20 PM	Bubbler valve closed
2/14/2011	4:57:20 PM	Main Vac valve opened
2/14/2011	4:57:20 PM	Bypass valve opened
2/14/2011	4:57:20 PM	Helium MFC set to  0.000000
2/14/2011	4:57:20 PM	H2 MFC set to  0.000000
2/14/2011	4:57:20 PM	BCl3 MFC set to  0.000000
2/14/2011	4:57:20 PM	PHl3 MFC set to  0.000000
2/14/2011	4:57:20 PM	SiCl4 MFC set to  0.000000
2/14/2011	4:57:20 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	4:57:21 PM	Tube furnace set to 0
2/14/2011	4:57:21 PM	Run finished at 4:57 PM
2/14/2011	4:57:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:00:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/14/2011	5:00:30 PM	Recipe started at 5:00 PM
2/14/2011	5:00:30 PM	Helium valve closed
2/14/2011	5:00:30 PM	H2 valve closed
2/14/2011	5:00:30 PM	BCl3 valve closed
2/14/2011	5:00:30 PM	PH3 valve closed
2/14/2011	5:00:30 PM	SiCl4 pre valve closed
2/14/2011	5:00:30 PM	SiCl4 post valve closed
2/14/2011	5:00:30 PM	Main Vac valve closed
2/14/2011	5:00:30 PM	Bypass valve closed
2/14/2011	5:00:30 PM	Bubbler valve closed
2/14/2011	5:00:30 PM	Helium MFC set to  0.000000
2/14/2011	5:00:30 PM	H2 MFC set to  0.000000
2/14/2011	5:00:30 PM	BCl3 MFC set to  0.000000
2/14/2011	5:00:30 PM	PHl3 MFC set to  0.000000
2/14/2011	5:00:30 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:00:30 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:00:30 PM	Tube furnace set to 0
2/14/2011	5:00:30 PM	Run finished at 5:00 PM
2/14/2011	5:00:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/14/2011	5:02:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:02:27 PM	Recipe started at 5:02 PM
2/14/2011	5:02:27 PM	Helium valve closed
2/14/2011	5:02:27 PM	H2 valve closed
2/14/2011	5:02:27 PM	BCl3 valve closed
2/14/2011	5:02:27 PM	PH3 valve closed
2/14/2011	5:02:27 PM	SiCl4 pre valve closed
2/14/2011	5:02:27 PM	SiCl4 post valve closed
2/14/2011	5:02:27 PM	Main Vac valve closed
2/14/2011	5:02:27 PM	Bubbler valve closed
2/14/2011	5:02:27 PM	Bypass valve opened
2/14/2011	5:02:27 PM	Helium MFC set to  0.000000
2/14/2011	5:02:27 PM	H2 MFC set to  0.000000
2/14/2011	5:02:27 PM	BCl3 MFC set to  0.000000
2/14/2011	5:02:27 PM	PHl3 MFC set to  0.000000
2/14/2011	5:02:27 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:02:27 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:02:28 PM	Tube furnace set to 0
2/14/2011	5:03:04 PM	Helium valve closed
2/14/2011	5:03:04 PM	H2 valve closed
2/14/2011	5:03:04 PM	BCl3 valve closed
2/14/2011	5:03:04 PM	PH3 valve closed
2/14/2011	5:03:04 PM	SiCl4 pre valve closed
2/14/2011	5:03:04 PM	SiCl4 post valve closed
2/14/2011	5:03:04 PM	Bubbler valve closed
2/14/2011	5:03:04 PM	Main Vac valve opened
2/14/2011	5:03:04 PM	Bypass valve opened
2/14/2011	5:03:04 PM	Helium MFC set to  0.000000
2/14/2011	5:03:04 PM	H2 MFC set to  0.000000
2/14/2011	5:03:04 PM	BCl3 MFC set to  0.000000
2/14/2011	5:03:04 PM	PHl3 MFC set to  0.000000
2/14/2011	5:03:04 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:03:04 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:03:04 PM	Tube furnace set to 0
2/14/2011	5:03:04 PM	Run finished at 5:03 PM
2/14/2011	5:03:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:04:07 PM	Helium MFC set to  10.000000
2/14/2011	5:04:09 PM	Helium MFC set to  100.000000
2/14/2011	5:04:11 PM	Helium valve opened
2/14/2011	5:04:14 PM	Helium valve closed
2/14/2011	5:04:26 PM	Helium valve opened
2/14/2011	5:04:30 PM	Helium valve closed
2/14/2011	5:08:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	5:08:49 PM	Recipe started at 5:08 PM
2/14/2011	5:08:49 PM	H2 valve closed
2/14/2011	5:08:49 PM	BCl3 valve closed
2/14/2011	5:08:49 PM	PH3 valve closed
2/14/2011	5:08:49 PM	SiCl4 pre valve closed
2/14/2011	5:08:49 PM	SiCl4 post valve closed
2/14/2011	5:08:49 PM	Main Vac valve closed
2/14/2011	5:08:49 PM	Bypass valve closed
2/14/2011	5:08:49 PM	Bubbler valve closed
2/14/2011	5:08:49 PM	Helium valve opened
2/14/2011	5:08:49 PM	Helium MFC set to  500.000000
2/14/2011	5:08:49 PM	H2 MFC set to  0.000000
2/14/2011	5:08:49 PM	BCl3 MFC set to  0.000000
2/14/2011	5:08:49 PM	PHl3 MFC set to  0.000000
2/14/2011	5:08:49 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:08:49 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:08:49 PM	Tube furnace set to 0
2/14/2011	5:10:02 PM	Helium valve closed
2/14/2011	5:10:02 PM	H2 valve closed
2/14/2011	5:10:02 PM	BCl3 valve closed
2/14/2011	5:10:02 PM	PH3 valve closed
2/14/2011	5:10:02 PM	SiCl4 pre valve closed
2/14/2011	5:10:02 PM	SiCl4 post valve closed
2/14/2011	5:10:02 PM	Main Vac valve closed
2/14/2011	5:10:02 PM	Bypass valve closed
2/14/2011	5:10:02 PM	Bubbler valve closed
2/14/2011	5:10:02 PM	Helium MFC set to  0.000000
2/14/2011	5:10:02 PM	H2 MFC set to  0.000000
2/14/2011	5:10:02 PM	BCl3 MFC set to  0.000000
2/14/2011	5:10:02 PM	PHl3 MFC set to  0.000000
2/14/2011	5:10:02 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:10:02 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:10:03 PM	Tube furnace set to 0
2/14/2011	5:10:03 PM	Run finished at 5:10 PM
2/14/2011	5:10:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	5:13:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:13:26 PM	Recipe started at 5:13 PM
2/14/2011	5:13:26 PM	Helium valve closed
2/14/2011	5:13:26 PM	H2 valve closed
2/14/2011	5:13:26 PM	BCl3 valve closed
2/14/2011	5:13:26 PM	PH3 valve closed
2/14/2011	5:13:26 PM	SiCl4 pre valve closed
2/14/2011	5:13:26 PM	SiCl4 post valve closed
2/14/2011	5:13:26 PM	Main Vac valve closed
2/14/2011	5:13:26 PM	Bubbler valve closed
2/14/2011	5:13:26 PM	Bypass valve opened
2/14/2011	5:13:26 PM	Helium MFC set to  0.000000
2/14/2011	5:13:26 PM	H2 MFC set to  0.000000
2/14/2011	5:13:26 PM	BCl3 MFC set to  0.000000
2/14/2011	5:13:26 PM	PHl3 MFC set to  0.000000
2/14/2011	5:13:26 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:13:26 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:13:26 PM	Tube furnace set to 0
2/14/2011	5:13:55 PM	Helium valve closed
2/14/2011	5:13:55 PM	H2 valve closed
2/14/2011	5:13:55 PM	BCl3 valve closed
2/14/2011	5:13:55 PM	PH3 valve closed
2/14/2011	5:13:55 PM	SiCl4 pre valve closed
2/14/2011	5:13:55 PM	SiCl4 post valve closed
2/14/2011	5:13:55 PM	Bubbler valve closed
2/14/2011	5:13:55 PM	Main Vac valve opened
2/14/2011	5:13:55 PM	Bypass valve opened
2/14/2011	5:13:55 PM	Helium MFC set to  0.000000
2/14/2011	5:13:55 PM	H2 MFC set to  0.000000
2/14/2011	5:13:55 PM	BCl3 MFC set to  0.000000
2/14/2011	5:13:55 PM	PHl3 MFC set to  0.000000
2/14/2011	5:13:55 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:13:55 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:13:55 PM	Tube furnace set to 0
2/14/2011	5:13:55 PM	Run finished at 5:13 PM
2/14/2011	5:13:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:14:39 PM	Helium MFC set to  100.000000
2/14/2011	5:14:43 PM	Helium valve opened
2/14/2011	5:14:44 PM	Helium valve closed
2/14/2011	5:16:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	5:16:46 PM	Recipe started at 5:16 PM
2/14/2011	5:16:46 PM	H2 valve closed
2/14/2011	5:16:46 PM	BCl3 valve closed
2/14/2011	5:16:46 PM	PH3 valve closed
2/14/2011	5:16:46 PM	SiCl4 pre valve closed
2/14/2011	5:16:46 PM	SiCl4 post valve closed
2/14/2011	5:16:46 PM	Main Vac valve closed
2/14/2011	5:16:46 PM	Bypass valve closed
2/14/2011	5:16:46 PM	Bubbler valve closed
2/14/2011	5:16:46 PM	Helium valve opened
2/14/2011	5:16:46 PM	Helium MFC set to  500.000000
2/14/2011	5:16:46 PM	H2 MFC set to  0.000000
2/14/2011	5:16:46 PM	BCl3 MFC set to  0.000000
2/14/2011	5:16:46 PM	PHl3 MFC set to  0.000000
2/14/2011	5:16:46 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:16:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:16:46 PM	Tube furnace set to 0
2/14/2011	5:18:06 PM	Helium valve closed
2/14/2011	5:18:06 PM	H2 valve closed
2/14/2011	5:18:06 PM	BCl3 valve closed
2/14/2011	5:18:06 PM	PH3 valve closed
2/14/2011	5:18:06 PM	SiCl4 pre valve closed
2/14/2011	5:18:06 PM	SiCl4 post valve closed
2/14/2011	5:18:06 PM	Main Vac valve closed
2/14/2011	5:18:06 PM	Bypass valve closed
2/14/2011	5:18:06 PM	Bubbler valve closed
2/14/2011	5:18:06 PM	Helium MFC set to  0.000000
2/14/2011	5:18:06 PM	H2 MFC set to  0.000000
2/14/2011	5:18:06 PM	BCl3 MFC set to  0.000000
2/14/2011	5:18:06 PM	PHl3 MFC set to  0.000000
2/14/2011	5:18:06 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:18:06 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:18:06 PM	Tube furnace set to 0
2/14/2011	5:18:06 PM	Run finished at 5:18 PM
2/14/2011	5:18:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	5:19:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:19:13 PM	Recipe started at 5:19 PM
2/14/2011	5:19:13 PM	Helium valve closed
2/14/2011	5:19:13 PM	H2 valve closed
2/14/2011	5:19:13 PM	BCl3 valve closed
2/14/2011	5:19:13 PM	PH3 valve closed
2/14/2011	5:19:13 PM	SiCl4 pre valve closed
2/14/2011	5:19:13 PM	SiCl4 post valve closed
2/14/2011	5:19:13 PM	Main Vac valve closed
2/14/2011	5:19:13 PM	Bubbler valve closed
2/14/2011	5:19:13 PM	Bypass valve opened
2/14/2011	5:19:13 PM	Helium MFC set to  0.000000
2/14/2011	5:19:13 PM	H2 MFC set to  0.000000
2/14/2011	5:19:13 PM	BCl3 MFC set to  0.000000
2/14/2011	5:19:13 PM	PHl3 MFC set to  0.000000
2/14/2011	5:19:13 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:19:13 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:19:13 PM	Tube furnace set to 0
2/14/2011	5:19:29 PM	Helium valve closed
2/14/2011	5:19:29 PM	H2 valve closed
2/14/2011	5:19:29 PM	BCl3 valve closed
2/14/2011	5:19:29 PM	PH3 valve closed
2/14/2011	5:19:29 PM	SiCl4 pre valve closed
2/14/2011	5:19:29 PM	SiCl4 post valve closed
2/14/2011	5:19:29 PM	Bubbler valve closed
2/14/2011	5:19:29 PM	Main Vac valve opened
2/14/2011	5:19:29 PM	Bypass valve opened
2/14/2011	5:19:29 PM	Helium MFC set to  0.000000
2/14/2011	5:19:29 PM	H2 MFC set to  0.000000
2/14/2011	5:19:29 PM	BCl3 MFC set to  0.000000
2/14/2011	5:19:29 PM	PHl3 MFC set to  0.000000
2/14/2011	5:19:29 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:19:30 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:19:30 PM	Tube furnace set to 0
2/14/2011	5:19:30 PM	Run finished at 5:19 PM
2/14/2011	5:19:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:20:17 PM	Helium MFC set to  100.000000
2/14/2011	5:20:18 PM	Helium valve opened
2/14/2011	5:20:20 PM	Helium valve closed
2/14/2011	5:20:27 PM	Helium valve opened
2/14/2011	5:20:29 PM	Helium valve closed
2/14/2011	5:21:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	5:21:38 PM	Recipe started at 5:21 PM
2/14/2011	5:21:38 PM	H2 valve closed
2/14/2011	5:21:38 PM	BCl3 valve closed
2/14/2011	5:21:38 PM	PH3 valve closed
2/14/2011	5:21:38 PM	SiCl4 pre valve closed
2/14/2011	5:21:38 PM	SiCl4 post valve closed
2/14/2011	5:21:38 PM	Main Vac valve closed
2/14/2011	5:21:38 PM	Bypass valve closed
2/14/2011	5:21:38 PM	Bubbler valve closed
2/14/2011	5:21:38 PM	Helium valve opened
2/14/2011	5:21:38 PM	Helium MFC set to  500.000000
2/14/2011	5:21:38 PM	H2 MFC set to  0.000000
2/14/2011	5:21:38 PM	BCl3 MFC set to  0.000000
2/14/2011	5:21:38 PM	PHl3 MFC set to  0.000000
2/14/2011	5:21:38 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:21:38 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:21:38 PM	Tube furnace set to 0
2/14/2011	5:22:29 PM	Helium valve closed
2/14/2011	5:22:29 PM	H2 valve closed
2/14/2011	5:22:29 PM	BCl3 valve closed
2/14/2011	5:22:29 PM	PH3 valve closed
2/14/2011	5:22:29 PM	SiCl4 pre valve closed
2/14/2011	5:22:29 PM	SiCl4 post valve closed
2/14/2011	5:22:29 PM	Main Vac valve closed
2/14/2011	5:22:29 PM	Bypass valve closed
2/14/2011	5:22:29 PM	Bubbler valve closed
2/14/2011	5:22:29 PM	Helium MFC set to  0.000000
2/14/2011	5:22:29 PM	H2 MFC set to  0.000000
2/14/2011	5:22:29 PM	BCl3 MFC set to  0.000000
2/14/2011	5:22:29 PM	PHl3 MFC set to  0.000000
2/14/2011	5:22:29 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:22:29 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:22:29 PM	Tube furnace set to 0
2/14/2011	5:22:29 PM	Run finished at 5:22 PM
2/14/2011	5:22:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	5:24:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:24:28 PM	Recipe started at 5:24 PM
2/14/2011	5:24:28 PM	Helium valve closed
2/14/2011	5:24:28 PM	H2 valve closed
2/14/2011	5:24:28 PM	BCl3 valve closed
2/14/2011	5:24:28 PM	PH3 valve closed
2/14/2011	5:24:28 PM	SiCl4 pre valve closed
2/14/2011	5:24:28 PM	SiCl4 post valve closed
2/14/2011	5:24:28 PM	Main Vac valve closed
2/14/2011	5:24:28 PM	Bubbler valve closed
2/14/2011	5:24:28 PM	Bypass valve opened
2/14/2011	5:24:28 PM	Helium MFC set to  0.000000
2/14/2011	5:24:28 PM	H2 MFC set to  0.000000
2/14/2011	5:24:28 PM	BCl3 MFC set to  0.000000
2/14/2011	5:24:28 PM	PHl3 MFC set to  0.000000
2/14/2011	5:24:28 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:24:28 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:24:28 PM	Tube furnace set to 0
2/14/2011	5:24:45 PM	Helium valve closed
2/14/2011	5:24:45 PM	H2 valve closed
2/14/2011	5:24:45 PM	BCl3 valve closed
2/14/2011	5:24:45 PM	PH3 valve closed
2/14/2011	5:24:45 PM	SiCl4 pre valve closed
2/14/2011	5:24:45 PM	SiCl4 post valve closed
2/14/2011	5:24:45 PM	Bubbler valve closed
2/14/2011	5:24:45 PM	Main Vac valve opened
2/14/2011	5:24:45 PM	Bypass valve opened
2/14/2011	5:24:45 PM	Helium MFC set to  0.000000
2/14/2011	5:24:45 PM	H2 MFC set to  0.000000
2/14/2011	5:24:45 PM	BCl3 MFC set to  0.000000
2/14/2011	5:24:45 PM	PHl3 MFC set to  0.000000
2/14/2011	5:24:45 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:24:45 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:24:45 PM	Tube furnace set to 0
2/14/2011	5:24:45 PM	Run finished at 5:24 PM
2/14/2011	5:24:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:25:11 PM	Helium MFC set to  100.000000
2/14/2011	5:25:12 PM	Helium valve opened
2/14/2011	5:25:14 PM	Helium valve closed
2/14/2011	5:25:18 PM	Helium valve opened
2/14/2011	5:25:21 PM	Helium valve closed
2/14/2011	5:27:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	5:27:10 PM	Recipe started at 5:27 PM
2/14/2011	5:27:10 PM	H2 valve closed
2/14/2011	5:27:10 PM	BCl3 valve closed
2/14/2011	5:27:10 PM	PH3 valve closed
2/14/2011	5:27:10 PM	SiCl4 pre valve closed
2/14/2011	5:27:10 PM	SiCl4 post valve closed
2/14/2011	5:27:10 PM	Main Vac valve closed
2/14/2011	5:27:10 PM	Bypass valve closed
2/14/2011	5:27:10 PM	Bubbler valve closed
2/14/2011	5:27:10 PM	Helium valve opened
2/14/2011	5:27:10 PM	Helium MFC set to  500.000000
2/14/2011	5:27:10 PM	H2 MFC set to  0.000000
2/14/2011	5:27:10 PM	BCl3 MFC set to  0.000000
2/14/2011	5:27:10 PM	PHl3 MFC set to  0.000000
2/14/2011	5:27:10 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:27:10 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:27:10 PM	Tube furnace set to 0
2/14/2011	5:28:01 PM	Helium valve closed
2/14/2011	5:28:01 PM	H2 valve closed
2/14/2011	5:28:01 PM	BCl3 valve closed
2/14/2011	5:28:01 PM	PH3 valve closed
2/14/2011	5:28:01 PM	SiCl4 pre valve closed
2/14/2011	5:28:01 PM	SiCl4 post valve closed
2/14/2011	5:28:01 PM	Main Vac valve closed
2/14/2011	5:28:01 PM	Bypass valve closed
2/14/2011	5:28:01 PM	Bubbler valve closed
2/14/2011	5:28:01 PM	Helium MFC set to  0.000000
2/14/2011	5:28:01 PM	H2 MFC set to  0.000000
2/14/2011	5:28:01 PM	BCl3 MFC set to  0.000000
2/14/2011	5:28:01 PM	PHl3 MFC set to  0.000000
2/14/2011	5:28:01 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:28:01 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:28:01 PM	Tube furnace set to 0
2/14/2011	5:28:01 PM	Run finished at 5:28 PM
2/14/2011	5:28:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	5:34:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:34:52 PM	Recipe started at 5:34 PM
2/14/2011	5:34:52 PM	Helium valve closed
2/14/2011	5:34:52 PM	H2 valve closed
2/14/2011	5:34:52 PM	BCl3 valve closed
2/14/2011	5:34:52 PM	PH3 valve closed
2/14/2011	5:34:52 PM	SiCl4 pre valve closed
2/14/2011	5:34:52 PM	SiCl4 post valve closed
2/14/2011	5:34:52 PM	Main Vac valve closed
2/14/2011	5:34:52 PM	Bubbler valve closed
2/14/2011	5:34:52 PM	Bypass valve opened
2/14/2011	5:34:52 PM	Helium MFC set to  0.000000
2/14/2011	5:34:52 PM	H2 MFC set to  0.000000
2/14/2011	5:34:52 PM	BCl3 MFC set to  0.000000
2/14/2011	5:34:52 PM	PHl3 MFC set to  0.000000
2/14/2011	5:34:52 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:34:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:34:52 PM	Tube furnace set to 0
2/14/2011	5:35:24 PM	Helium valve closed
2/14/2011	5:35:24 PM	H2 valve closed
2/14/2011	5:35:24 PM	BCl3 valve closed
2/14/2011	5:35:24 PM	PH3 valve closed
2/14/2011	5:35:24 PM	SiCl4 pre valve closed
2/14/2011	5:35:24 PM	SiCl4 post valve closed
2/14/2011	5:35:24 PM	Bubbler valve closed
2/14/2011	5:35:24 PM	Main Vac valve opened
2/14/2011	5:35:24 PM	Bypass valve opened
2/14/2011	5:35:24 PM	Helium MFC set to  0.000000
2/14/2011	5:35:24 PM	H2 MFC set to  0.000000
2/14/2011	5:35:24 PM	BCl3 MFC set to  0.000000
2/14/2011	5:35:24 PM	PHl3 MFC set to  0.000000
2/14/2011	5:35:24 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:35:24 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:35:25 PM	Tube furnace set to 0
2/14/2011	5:35:25 PM	Run finished at 5:35 PM
2/14/2011	5:35:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:35:32 PM	Helium MFC set to  75.000000
2/14/2011	5:35:43 PM	Helium valve opened
2/14/2011	5:35:46 PM	Helium valve closed
2/14/2011	5:35:56 PM	Helium valve opened
2/14/2011	5:36:00 PM	Helium valve closed
2/14/2011	5:40:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	5:40:07 PM	Recipe started at 5:40 PM
2/14/2011	5:40:07 PM	H2 valve closed
2/14/2011	5:40:07 PM	BCl3 valve closed
2/14/2011	5:40:07 PM	PH3 valve closed
2/14/2011	5:40:07 PM	SiCl4 pre valve closed
2/14/2011	5:40:07 PM	SiCl4 post valve closed
2/14/2011	5:40:07 PM	Main Vac valve closed
2/14/2011	5:40:07 PM	Bypass valve closed
2/14/2011	5:40:07 PM	Bubbler valve closed
2/14/2011	5:40:07 PM	Helium valve opened
2/14/2011	5:40:07 PM	Helium MFC set to  500.000000
2/14/2011	5:40:07 PM	H2 MFC set to  0.000000
2/14/2011	5:40:07 PM	BCl3 MFC set to  0.000000
2/14/2011	5:40:07 PM	PHl3 MFC set to  0.000000
2/14/2011	5:40:07 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:40:07 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:40:07 PM	Tube furnace set to 0
2/14/2011	5:40:39 PM	Helium valve closed
2/14/2011	5:40:39 PM	H2 valve closed
2/14/2011	5:40:39 PM	BCl3 valve closed
2/14/2011	5:40:39 PM	PH3 valve closed
2/14/2011	5:40:39 PM	SiCl4 pre valve closed
2/14/2011	5:40:39 PM	SiCl4 post valve closed
2/14/2011	5:40:39 PM	Main Vac valve closed
2/14/2011	5:40:39 PM	Bypass valve closed
2/14/2011	5:40:39 PM	Bubbler valve closed
2/14/2011	5:40:39 PM	Helium MFC set to  0.000000
2/14/2011	5:40:39 PM	H2 MFC set to  0.000000
2/14/2011	5:40:39 PM	BCl3 MFC set to  0.000000
2/14/2011	5:40:39 PM	PHl3 MFC set to  0.000000
2/14/2011	5:40:39 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:40:39 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:40:39 PM	Tube furnace set to 0
2/14/2011	5:40:39 PM	Run finished at 5:40 PM
2/14/2011	5:40:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2011	5:46:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:46:46 PM	Recipe started at 5:46 PM
2/14/2011	5:46:46 PM	Helium valve closed
2/14/2011	5:46:46 PM	H2 valve closed
2/14/2011	5:46:46 PM	BCl3 valve closed
2/14/2011	5:46:46 PM	PH3 valve closed
2/14/2011	5:46:46 PM	SiCl4 pre valve closed
2/14/2011	5:46:46 PM	SiCl4 post valve closed
2/14/2011	5:46:46 PM	Main Vac valve closed
2/14/2011	5:46:46 PM	Bubbler valve closed
2/14/2011	5:46:46 PM	Bypass valve opened
2/14/2011	5:46:46 PM	Helium MFC set to  0.000000
2/14/2011	5:46:46 PM	H2 MFC set to  0.000000
2/14/2011	5:46:46 PM	BCl3 MFC set to  0.000000
2/14/2011	5:46:46 PM	PHl3 MFC set to  0.000000
2/14/2011	5:46:46 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:46:46 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:46:47 PM	Tube furnace set to 0
2/14/2011	5:47:22 PM	Helium valve closed
2/14/2011	5:47:22 PM	H2 valve closed
2/14/2011	5:47:22 PM	BCl3 valve closed
2/14/2011	5:47:22 PM	PH3 valve closed
2/14/2011	5:47:22 PM	SiCl4 pre valve closed
2/14/2011	5:47:22 PM	SiCl4 post valve closed
2/14/2011	5:47:22 PM	Bubbler valve closed
2/14/2011	5:47:22 PM	Main Vac valve opened
2/14/2011	5:47:22 PM	Bypass valve opened
2/14/2011	5:47:22 PM	Helium MFC set to  0.000000
2/14/2011	5:47:22 PM	H2 MFC set to  0.000000
2/14/2011	5:47:22 PM	BCl3 MFC set to  0.000000
2/14/2011	5:47:22 PM	PHl3 MFC set to  0.000000
2/14/2011	5:47:22 PM	SiCl4 MFC set to  0.000000
2/14/2011	5:47:22 PM	Bypass solenoid MFC set to  0.000000
2/14/2011	5:47:22 PM	Tube furnace set to 0
2/14/2011	5:47:23 PM	Run finished at 5:47 PM
2/14/2011	5:47:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2011	5:47:49 PM	Helium MFC set to  75.000000
2/14/2011	5:47:50 PM	Helium valve opened
2/14/2011	5:47:55 PM	Helium valve closed
2/14/2011	5:47:59 PM	Helium valve opened
2/14/2011	5:48:04 PM	Helium valve closed
2/14/2011	5:48:40 PM	Helium valve opened
2/14/2011	5:48:47 PM	Helium valve closed
